Polishing pad
AssigneeKuraray Co., Ltd.
InventorsAzusa SUNAYAMA, Mitsuru KATO, Minori TAKEGOSHI
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AssigneeKuraray Co., Ltd.
InventorsAzusa SUNAYAMA, Mitsuru KATO, Minori TAKEGOSHI
Estimating the term…
A polishing pad is provided with a spiral groove or concentric grooves disposed spanning from a central region to a peripheral edge region of a polishing surface of the polishing pad, and radial grooves including line segment-shaped grooves extending from the central region toward the peripheral edge region. The line segment-shaped grooves have a first end portion and a second end portion, positioned at a distance of 5 to 10% and at a distance of 35 to 70% of the radius of the polishing surface from a center of the radial grooves, respectively, and the line segment-shaped grooves have an average length of 30 to 65% of the radius of the polishing surface. A cross-sectional area Sa (mm2) of the line segment-shaped grooves and a cross-sectional area Sb (mm2) of the spiral groove or the concentric grooves satisfy 0.1≤Sb/Sa<1.0.
A polishing pad comprising a polishing layer having a circular polishing surface,
Dependencies are inferred from the claim text.