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US 2025/0083200 A1Published application
Abrasion detection device, abrasion detection method, substrate cleaning device, and substrate cleaning method
AssigneeEbara Corporation
InventorSAKI MIYAGAWA
Life of this patent
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Abstract
An abrasion detection device is provided, including: one or more sensors, outputting a measurement value in accordance with abrasion of a substrate cleaning tool; a pressing mechanism, pressing the substrate cleaning tool against the sensor; and a determination part, performing a determination on whether it is necessary to replace the substrate cleaning tool in accordance with the measurement value from the sensor.
Claims19
An abrasion detection device, comprising:
- a plurality of sensors, outputting measurement values in accordance with an abrasion of a substrate cleaning tool;
- a pressing mechanism, pressing the substrate cleaning tool against the sensors;
- and
- a determination part, performing a determination on whether it is necessary to replace the substrate cleaning tool and performing a determination on whether it is necessary to change a cleaning parameter at a time of performing substrate cleaning by using the substrate cleaning tool in accordance with the measurement values from the sensors.
1 more element
An abrasion detection method, comprising:
- a first process of pressing a substrate cleaning tool against a plurality of sensors that output measurement values in accordance with abrasion of the substrate cleaning tool;
- and
- a second process of performing a determination on whether it is necessary to replace the substrate cleaning tool and a determination on whether it is necessary to change a cleaning parameter at a time of performing substrate cleaning by using the substrate cleaning tool in accordance with the measurement values from the sensors.
A substrate cleaning method, comprising:
- a first process of learning a relationship between a measurement value at a time when a substrate cleaning tool is pressed against one or more sensors outputting the measurement value in accordance with abrasion of a substrate cleaning tool and an appropriate value of a cleaning parameter at a time of performing substrate cleaning by using the substrate cleaning tool;
- and
- a second process of pressing the substrate cleaning tool against the one or more sensors;
- a third process of changing the cleaning parameter in accordance with the measurement value from the sensor in the second process based on a learning result in the first process;
- and
- a fourth process of performing substrate cleaning based on the cleaning parameter that is changed.
3 more elements
Dependencies are inferred from the claim text.