Method for Cleaning Particulate Contaminant

Abstract

The present disclosure provides a method for cleaning particulate contaminants and relates to the technical field of cleaning methods. The method for cleaning particulate contaminants includes spraying the nitrogen-argon supercritical mixed fluid on the to-be-cleaned workpiece, wherein the nitrogen-argon supercritical mixed fluid has a temperature of −120° C. to −90° C. and a pressure of 4 to 5 MPa. By utilizing a nitrogen-argon supercritical mixed fluid to perform surface cleaning on the to-be-cleaned workpiece, and controlling the temperature and pressure of the nitrogen-argon supercritical mixed fluid, compared to conventional supercritical fluid such as carbon dioxide, it can significantly enhance the cleaning effectiveness against particulate contaminants on the workpiece surface without affecting the coating on the workpiece surface.

Dependencies are inferred from the claim text.