Multiplexed nucleic acid amplification test on semiconductor substrate

A method, comprising:

• providing a fluid containing a biological sample to a main reaction reservoir of a packaged integrated circuit (IC) sensor, the biological sample including a nucleic strand, and the main reaction reservoir stores a first reagent;
• allowing the fluid to flow from the main reaction reservoir to a first detection reservoir and a second detection reservoir of the packaged IC sensor, in which the first detection reservoir stores a second reagent to replicate nucleic strands of a first detection target, and the second detection reservoir stores a third reagent to replicate nucleic strands of a second detection target;
• replicating the nucleic strand in the main reaction reservoir using the first reagent;
• providing first and second portions of the replicated nucleic strands to the first and second detection reservoirs, respectively, by pumping;
• replicating the first portion of the replicated nucleic strands in the first detection reservoir using the second reagent;
• comparing pH levels of the first and second portions of the biological sample in the first and second detection reservoirs to a pH level of a reference reservoir of the packaged IC sensor;
• and
• based on the comparisons, determining whether the biological sample contains the first detection target.

A method comprising:

• providing a fluid containing a biological sample to a main reaction reservoir of a packaged integrated circuit (IC) sensor, the biological sample including a nucleic strand, and the main reaction reservoir stores a first reagent;
• allowing the fluid to flow from the main reaction reservoir to a reference reservoir;
• replicating the nucleic strand in the main reaction reservoir using the first reagent;
• determining a pH change in the main reaction reservoir;
• responsive to the pH change exceeding a threshold, providing first and second portions of the replicated nucleic strands to the first and second detection reservoirs, respectively, by opening valves, in which the first detection reservoir stores a second reagent to replicate nucleic strands of a first detection target, and the second detection reservoir stores a third reagent to replicate nucleic strands of a second detection target;
• replicating the first portion of the replicated nucleic strands in the first detection reservoir using the second reagent;
• comparing pH levels of the first and second portions of the biological sample in the first and second detection reservoirs to a pH level of the reference reservoir;
• and
• based on the comparisons, determining whether the biological sample contains the first detection target.

A method, comprising:

• forming a semiconductor substrate;
• forming a back end of line (BEOL) on the semiconductor substrate, the BEOL including a microfluidic channel, the microfluidic channel having first and second openings that extend through the BEOL and away from the semiconductor substrate;
• and
• forming a fluidic structure on the BEOL having a first cavity and a second cavity, the first cavity being directly over the first opening, and the second cavity being directly over the second opening, wherein the first and second cavities are configured to replicate nucleic strands using the first and second reagents, respectively.