Voc removal apparatus
AssigneeMurata Manufacturing Co., Ltd.
InventorsYukio SANADA, Teppei KAWAI, Teruhisa SHIBAHARA
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AssigneeMurata Manufacturing Co., Ltd.
InventorsYukio SANADA, Teppei KAWAI, Teruhisa SHIBAHARA
Estimating the term…
A VOC removal apparatus that includes: a VOC adsorption rotor including a cellular structure, the cellular structure being made of metal and supporting an adsorbent to adsorb a VOC, wherein the VOC adsorption rotor has: an adsorption zone through which a process gas is passed for adsorption of a VOC contained in the process gas, a desorption zone in which the VOC adsorbed in the adsorption zone is desorbed, and a cooling zone in which the cellular structure is cooled; a pair of electrodes each respectively disposed at opposed outer side portions of the VOC adsorption rotor in a direction in which a rotational axis of the VOC adsorption rotor extends, the pair of electrodes being positioned in contact with the VOC adsorption rotor in the desorption zone; and a voltage application device constructed to apply a voltage to the pair of electrodes.
A VOC removal apparatus comprising:
Dependencies are inferred from the claim text.