Voc removal method
AssigneeMurata Manufacturing Co., Ltd.
InventorsYukio SANADA, Teppei KAWAI, Teruhisa SHIBAHARA
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AssigneeMurata Manufacturing Co., Ltd.
InventorsYukio SANADA, Teppei KAWAI, Teruhisa SHIBAHARA
Estimating the term…
A VOC removal method that includes: adsorbing a VOC contained in a process gas by passing the process gas through an adsorption zone of a VOC adsorption rotor that includes a cellular structure supporting an adsorbent to adsorb a VOC, wherein the cellular structure is made of metal; desorbing the VOC adsorbed in the adsorption zone by heating the cellular structure by passing current through the cellular structure in a desorption zone of the VOC adsorption rotor and passing a gaseous substance through the desorption zone of the VOC adsorption rotor; and cooling the cellular structure heated in the desorption zone in a cooling zone of the VOC adsorption rotor.
A VOC removal method comprising:
Dependencies are inferred from the claim text.