Back to results
US 2025/0063932 A1Published application
Mask, method of manufacturing the same, and method of manufacturing display panel
AssigneeSamsung Display Co., Ltd.
InventorsKabjong SEO, Minsuk KO, Bogeon JEON
Life of this patent
Estimating the term…
Abstract
A manufacturing method of a mask includes forming a first mask layer, forming a second mask layer on the first mask layer, forming a photoresist pattern layer on the second mask layer, removing a first area of the second mask layer, which is exposed through the photoresist pattern layer, defining an opening through the first mask layer, removing a portion of the photoresist pattern layer to expose a portion of a second area of the second mask layer, and removing the portion of the second area of the second mask layer.
Claims3
A mask comprising:
- a first mask layer through which a first opening is defined, the first mask layer comprising a polymer material;
- and
- a second mask layer which contacts a surface of the first mask layer and through which a second opening is defined,
- wherein a first sidewall of the first mask layer defining the first opening is aligned with a second sidewall of the second mask layer defining the second opening.
1 more element
Dependencies are inferred from the claim text.