Managing vertical structures in three-dimensional semiconductive devices
AssigneeYangtze Memory Technologies Co., Ltd.
InventorZhaoyun TANG
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorZhaoyun TANG
Estimating the term…
Systems, devices, and methods for managing vertical structures in three-dimensional (3D) semiconductor devices are provided. In one aspect, a method includes: providing a semiconductor substrate, and forming isolating regions between a plurality of adjacent vertical transistors in the semiconductor substrate. Each vertical transistor of the plurality of adjacent vertical transistors extends along a vertical direction. Two adjacent vertical transistors and a corresponding isolating region between the two adjacent vertical transistors are positioned along a horizontal direction perpendicular to the vertical direction. The corresponding isolating region includes a conductive material, and, along the vertical direction, a length of the conductive material in the corresponding isolating region is greater than a length of a vertical gate of each of the two adjacent vertical transistors.
A method comprising:
A semiconductor device, comprising:
A system, comprising:
Dependencies are inferred from the claim text.