Trench liner fuse
AssigneeInternational Business Machines Corporation
InventorsAshim Dutta, Chih-Chao Yang, Ailian Zhao, Wu-Chang Tsai
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AssigneeInternational Business Machines Corporation
InventorsAshim Dutta, Chih-Chao Yang, Ailian Zhao, Wu-Chang Tsai
Estimating the term…
A fuse structure including a first conductive line and a second conductive line, a first metal pillar extending vertically from a top surface of the first conductive line and a second metal pillar extending vertically from a top surface of the second conductive line, a conductive link electrically connecting a top surface of the first metal pillar with a top surface of the second metal pillar, where both the first conductive line and the second conductive line are a different material than both the first metal pillar and the second metal pillar, and where both the first metal pillar and the second metal pillar are a different metal than the conductive link.
A fuse structure comprising:
A fuse structure comprising:
A fuse structure comprising:
Dependencies are inferred from the claim text.