Method of manufacturing fan-out packaging device and fan-out packaging device manufactured thereby
AssigneeSilicon Box Pte. Ltd.
InventorSehat Sutardja
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AssigneeSilicon Box Pte. Ltd.
InventorSehat Sutardja
Estimating the term…
Disclosed is a method of manufacturing a fan-out packaging device, which is a method of manufacturing a packaging device using a wafer or panel level packaging process, the method including forming an additional GND layer on a part of a fan-out packaging substrate, forming a first dielectric layer having a first via hole on the additional GND layer, forming a redistribution layer (RDL) on the first dielectric layer and the first via hole, forming a second dielectric layer having a second via hole on the redistribution layer, and forming a bump structure on the second dielectric layer and the second via hole so as to be connected to the redistribution layer, wherein the additional GND layer is formed in directions toward four sides or at least two opposite sides of a die.
A method of manufacturing packaging device, which is a method of manufacturing a packaging device using a wafer or panel level packaging process, the method comprising:
A fan-out packaging device, which is a packaging device using a wafer or panel level packaging process, the fan-out packaging device comprising:
Dependencies are inferred from the claim text.