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US 2025/0062147 A1Published application
System and method for wafer manufacturing process management
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRong Syuan FAN, Jen-Yuan CHANG, Mei-Hsuan LIN
Life of this patent
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Abstract
A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.
Claims20
A method, comprising:
- loading a plurality of transport cases into a plurality of storage ports of a portable clean room stocker;
- flowing purging fluids through the transport cases within the portable clean room stocker;
- and
- driving, with a vehicle guidance module of the portable cleanroom stocker, the portable cleanroom stocker into an unmanned electric vehicle while flowing the purging fluids through the transport cases.
1 more element
A portable cleanroom stocker, comprising:
- a plurality of storage ports each configured to hold a respective transport case configured to hold a plurality of wafers;
- an interior environment management system configured to maintain cleanroom conditions for the plurality of storage ports;
- wheels;
- and
- a vehicle guidance module configured to drive the portable cleanroom stocker and to maneuver the portable cleanroom stocker into an unmanned electronic vehicle.
2 more elements
A method, comprising:
- generating, with a manufacturing execution system associated with a first semiconductor processing site, a command for an unmanned electric vehicle to carry a portable cleanroom stocker to a second semiconductor processing site;
- storing, with the portable cleanroom stocker, a transport case holding a semiconductor wafer;
- and
- driving, with a vehicle guidance module of the portable cleanroom stocker, the portable cleanroom stocker into the unmanned electric vehicle.
1 more element
Dependencies are inferred from the claim text.