System and method for dynamic aberration correction

An electron-optical system, the electron-optical system comprising:

• a controller communicatively coupled to a deflector assembly and a detector assembly, the controller including one or more processors configured to cause a set of program instructions to:
• direct a first Wien filter of a first deflector assembly to deflect a primary electron beam to an objective lens within an electron-optical column to correct coma blur, wherein the objective lens generates off-axis chromatic aberration upon minimizing the coma of the primary electron beam;
• adjust one of a strength or orientation of the first Wien filter to correct the off-axis chromatic aberration in the primary electron beam generated by the objective lens;
• adjust a beam voltage of an electron beam source to amplify an energy source spread of the electron beam source;
• and
• receive a sample image of the sample from a detector assembly to verify aberration correction in the primary electron beam, wherein the detector assembly generates the sample image of the sample based on the adjusted beam voltage.

A method comprising:

• generating a primary electron beam with an electron beam source;
• directing the primary electron beams to a sample with an electron-optical column;
• deflecting the primary electron beam to an objective lens of the electron-optical column using a first Wien filter to correct for coma blur in the primary electron beam;
• generating off-axis chromatic aberration in the primary electron beam using the objective lens;
• adjusting one of a strength or orientation of the Wien filter to correct the off-axis chromatic aberration in the primary electron beam generated by the objective lens;
• and
• detecting one or more secondary electrons emanating from the sample.