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US 2025/0061565 A1Published application
Substrate processing apparatus and substrate processing method
AssigneeSCREEN Holdings Co., Ltd.
InventorsHideji NAOHARA, Hiroaki KAKUMA
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Abstract
A substrate processing apparatus processes a substrate. The substrate processing apparatus includes at least one processing unit that processes the substrate, first and second cameras that image different subject areas, and an association processing unit that generates association information indicating association between each of the subject areas and each of the first and second cameras by processing an image captured by each of the first and second cameras.
Claims3
A substrate processing apparatus that processes a substrate, comprising:
- at least one chamber that processes the substrate;
- first and second cameras that image different subject areas;
- an association processing unit that generates association information indicating association between each of said subject areas and each of said first and second cameras by processing an image captured by each of said first and second cameras
- a memory that stores reference information indicating said subject area corresponding to an index object, wherein
- said chamber includes said index object, and
- said controller identifies said subject area corresponding to said image based on a figure of said index object and said reference information.
3 more elements
Dependencies are inferred from the claim text.