Back to results
US 2025/0061244 A1Published application
Simulation method, program, and storage medium
AssigneeKioxia Corporation
InventorsWeiting WANG, Kazuyuki HINO
Life of this patent
Estimating the term…
Abstract
A simulation method includes correcting a layout of a stacked structure based on a shape of the stacked structure; calculating a first feature value of the corrected layout; and simulating a polishing process for the corrected layout based on the first feature value.
Claims20
A simulation method comprising:
- correcting a layout of a stacked structure based on a shape of the stacked structure;
- calculating a first feature value of the corrected layout;
- and
- simulating a polishing process for the corrected layout based on the first feature value.
1 more element
A non-transitory computer-readable storage medium storing a program for causing a computer to execute a process, the process comprising:
- correcting a layout of a stacked structure based on a shape of the stacked structure;
- calculating a first feature value of the corrected layout;
- and
- simulating a polishing process for the corrected layout based on the first feature value.
1 more element
Dependencies are inferred from the claim text.