System and method for duration-based sample path adjustment
AssigneeKLA Corporation
InventorArthur Kalman
Life of this patent
Estimating the term…
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AssigneeKLA Corporation
InventorArthur Kalman
Estimating the term…
A method for duration-based sample path adjustment includes receiving an initial sample map. The method includes generating one or more adjusted sample maps including one or more adjusted paths of the set of site points of the initial sample map. The method includes generating a final sample map of the sample based on the one or more adjusted paths, where the final sample map includes a final path. The method includes directing an optical sub-system to perform one or more operations on the sample based on the final sample map. The optical sub-system performs the one or more operations by following the final path of the set of site points on the sample, where at least one of the first duration or the first distance of the initial path are greater than at least one of the second duration or the second distance of the final path.
A system comprising:
A system comprising:
A method comprising:
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