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US 2025/0060298 A1Published application
In-situ particle detection
AssigneeApplied Materials, Inc.
InventorsWei Weng, Chang Ke, Changgong Wang
Life of this patent
Estimating the term…
Abstract
A processing system includes a processing chamber defining a processing region. A foreline is coupled with the processing chamber and defines a fluid conduit. A plasma trap is provided within an interior of the foreline to charge and trap at least some particles in the fluid conduit. The system further includes a particle detector to collect at least some of the charged particles and measure an electric charge produced by the particles.
Claims20
A processing system, comprising:
- a processing chamber defining a processing region;
- a foreline coupled with the processing chamber, the foreline defining a fluid conduit;
- a plasma trap provided within an interior of the foreline, the plasma trap configured to charge and trap at least some particles in the fluid conduit;
- and
- a particle detector to measure a quantity of particles trapped in the plasma trap.
2 more elements
A method, comprising:
- electrostatically charging, through a plasma source, particles in a medium, to form charged particles;
- trapping the charged particles in a chamber for a time period;
- turning off the plasma source to release the charged particles to flow into a conduit;
- collecting at least some of the charged particles released in the conduit onto a conductive medium;
- and
- measuring an electric current produced by the charged particles collected on the conductive medium.
3 more elements
A method, comprising:
- providing a plasma trap in a conduit of a processing chamber;
- charging particles in the plasma trap for a predetermined period of time;
- releasing the charged particles after the predetermined period of time;
- collecting at least some of the charged particles on a metal plate;
- and
- measuring an electric current produced by the charged particles collected on the metal plate.
3 more elements
Dependencies are inferred from the claim text.