Cmp conditioning disc and method of manufacturing the cmp conditioning disc
AssigneeEhwa Diamond Industrial Co., Ltd.
InventorsYongsik MOON, Kyoungkuk KWACK, Jongkuk PARK, Eunhwa SONG, Youngtae JEON
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Abstract
A method of manufacturing a CMP conditioning disc, includes: a primary forming layer forming step of forming a primary forming layer on an outer surface of a shank base and arranging a plurality of diamonds on the primary forming layer; and a secondary forming layer forming step of forming a secondary forming layer on an upper surface of the primary forming layer and exposing at least a portion of the diamonds in the secondary forming layer.
Claims12
A method for manufacturing a CMP (chemical mechanical polishing) conditioning disc, comprising:
- forming a primary forming layer on an outer surface of a shank base;
- and arranging a plurality of diamonds on the primary forming layer;
- and
- forming a secondary forming layer on an upper surface of the primary forming layer;
- and exposing at least a portion of the diamonds in the secondary forming layer.
A CMP conditioning disc comprising:
- a shank base;
- a primary forming layer formed on an outer surface of the shank base;
- a secondary forming layer formed on an outer surface of the primary forming layer;
- and
- a plurality of diamonds arranged in the primary forming layer and the secondary forming layer, at least a portion of the diamonds being exposed from the secondary forming layer.
Dependencies are inferred from the claim text.