Optical resolution measurement method for optical devices
AssigneeApplied Materials, Inc.
InventorsJinxin FU, Yangyang SUN, Ludovic GODET
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsJinxin FU, Yangyang SUN, Ludovic GODET
Estimating the term…
Embodiments herein provide for a method of determining an optical device modulation transfer function (MTF). The method described herein includes projecting a first instance of an image from a light engine to a detector. The first instance of the image is analyzed to determine a first function. A first fast Fourier transform (FFT) or a first MTF of the first function is obtained. The method further includes projecting a second instance of the image from the light engine to detector via one or more optical devices. The second instance of the image is analyzed to determine a second function. A second FFT or a second MTF is obtained of the second function. An optical device MTF of the one or more optical devices is determined by comparing the first FFT and the second FFT or by comparing the first MTF and the second MTF.
A method, comprising:
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.