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US 2025/0053094 A1Published application
Shutter device, lithography apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKENTAROU USHIKU, MIZUMA MURAKAMI, MAHIRO SAITO
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Abstract
A shutter device for passing and blocking light, includes a rotation source configured to rotationally drive a rotation shaft, a hub connected to the rotation shaft, and a shutter blade fixed to the hub. The hub includes a holding surface that holds the shutter blade, and the holding surface includes a first region belonging to a predetermined plane and a second region separated from the predetermined plane. The shutter blade contacts the first region and the second region while being fixed to the hub.
Claims20
A shutter device for passing and blocking light, comprising:
- a rotation source configured to rotationally drive a rotation shaft;
- a hub connected to the rotation shaft;
- and
- a shutter blade fixed to the hub,
- wherein the hub includes a holding surface that holds the shutter blade, and the holding surface includes a first region belonging to a predetermined plane and a second region separated from the predetermined plane, and
- the shutter blade contacts the first region and the second region while being fixed to the hub.
3 more elements
Dependencies are inferred from the claim text.