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US 2025/0053078 A1Published application
Pellicle frame and pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYu YANASE
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Abstract
The present invention is to provide a pellicle frame characterized by including a metal or alloy having a linear expansion coefficient of 10×10−6 (1/K) or less and further a density of 4.6 g/cm3 or less, and a pellicle characterized by including the pellicle frame as an element.
Claims21
A pellicle frame, comprising:
- a metal or alloy having a linear expansion coefficient of 10×10−6 (1/K) or less, wherein the pellicle frame has a thickness of less than 2.5 mm.
A pellicle frame, comprising a metal or alloy, wherein the metal or alloy is titanium or a titanium alloy, and
- the pellicle frame has a thickness of less than 2.5 mm.
Dependencies are inferred from the claim text.