Crucibles having anchors
AssigneeGlobalWafers Co., Ltd.
InventorsRichard Joseph Phillips, William Luter
Life of this patent
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Abstract
Crucibles for holding a silicon melt are disclosed. The crucible includes a crucible body having a floor and a sidewall extending up from the floor. The floor and sidewall define a cavity for holding the silicon melt. The crucible body has an inner surface and an outer surface. One or more anchors extend into the cavity from the inner surface of the floor. Methods for forming a single crystal silicon ingot are also disclosed. The anchors may resist the buoyancy of a solid layer of silicon in double-layer Czochralski methods.
Claims11
A crucible for holding a silicon melt, the crucible comprising:
- a crucible body having a floor and a sidewall extending up from the floor, the floor and sidewall defining a cavity for holding the silicon melt, the crucible body having an inner surface and an outer surface;
- and
- one or more anchors that extend into the cavity from the inner surface of the floor.
11-33. (canceled)
Dependencies are inferred from the claim text.