Cross flow conduit for foaming prevention in high convection plating cells

An electroplating apparatus comprising:

• an electroplating cell configured to contain an electrolyte and an anode while electroplating metal onto a substrate;
• a fluid containment unit having an inlet and configured to receive the electrolyte via the inlet, wherein the inlet comprises an opening in a body of the fluid containment unit, located lower than a fluid level in the fluid containment unit during electroplating;
• a substrate holder configured to hold the substrate such that a plating face of the substrate is separated from the anode during electroplating;
• a channeled ionically resistive plate including a substrate-facing surface that is separated from the plating face of the substrate by a cross flow region;
• a cross flow inlet to the cross flow region for providing electrolyte to the cross flow region;
• and
• a cross flow conduit comprising a channel for diverting electrolyte from the cross flow region to the inlet feeding the fluid containment unit of the electroplating cell, the cross flow region being between the cross flow inlet and cross flow conduit, wherein the fluid level in the fluid containment unit during electroplating is lower than the fluid level in the cross flow region.