Substrate with holder with linear slide mechanism
AssigneeKateeva, Inc.
InventorDigby PUN
Life of this patent
Estimating the term…
Abstract
A substrate holder for an inkjet printer is described herein. The substrate holder has a contact member having a contact surface and a carriage surface opposite from the contact surface and a carriage coupled to the carriage surface, the carriage having a direction of motion extending in a first direction. The carriage has a base member and a linear slide mechanism coupling the base member to the contact member, the linear slide mechanism oriented with a direction of linear displacement at an acute angle with the direction of motion in a plane parallel to the contact surface.
Claims20
A method of processing a substrate, the method comprising:
- vacuum coupling a substrate to a contact surface of a contact member of a substrate holder of an inkjet printing system;
- coupling a carriage surface of the contact member to a carriage of the substrate holder, the carriage having a direction of motion and comprising:
- a base member;
- and
- a linear slide mechanism coupling the base member to the contact member, the linear slide mechanism oriented with a linear displacement that forms an acute angle with the direction of motion in a plane parallel to the contact surface;
- moving the carriage along a linear support to translate the substrate in the direction of motion;
- and
- operating the linear slide mechanism to maintain a constant position of the substrate along an axis perpendicular to the direction of motion and to maintain a constant rotational orientation of the substrate.
A method of processing a substrate, the method comprising:
- vacuum coupling a substrate to a contact surface of a contact member of a substrate holder of an inkjet printing system;
- coupling a carriage surface of the contact member to a carriage of the substrate holder, the carriage having a direction of motion and comprising:
- a base member;
- and
- a linear slide mechanism coupling the base member to the contact member, the linear slide mechanism oriented with a linear displacement that forms an acute angle with the direction of motion in a plane parallel to the contact surface;
- moving the carriage along a linear support to translate the substrate in the direction of motion;
- detecting misalignment of the substrate using an optical positioning system having a first component coupled to the substrate holder and a second component coupled to the linear support;
- and
- operating the linear slide mechanism to maintain a constant position of the substrate along an axis perpendicular to the direction of motion and to maintain a constant rotational orientation of the substrate.
A method of processing a substrate, the method comprising:
- vacuum coupling a substrate to a contact surface of a contact member of a substrate holder of an inkjet printing system;
- coupling a carriage surface of the contact member to a carriage of the substrate holder, the carriage having a direction of motion and comprising:
- a base member;
- and
- a linear slide mechanism coupling the base member to the contact member, the linear slide mechanism oriented with a linear displacement that forms an acute angle with the direction of motion in a plane parallel to the contact surface;
- moving the carriage along a linear support to translate the substrate in the direction of motion;
- detecting misalignment of the substrate using an optical positioning system having a first component coupled to the substrate holder and a second component coupled to the linear support;
- and
- operating the linear slide mechanism to correct misalignment of the substrate by moving the substrate along an axis perpendicular to the direction of motion and by rotating the substrate.
Dependencies are inferred from the claim text.