Vacuum pump, rotating body for vacuum pump, and method for manufacturing vacuum pump
AssigneeEdwards Japan Limited
InventorTakashi Kabasawa
Life of this patent
Estimating the term…
Abstract
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided. Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.
Claims15
A vacuum pump comprising:
- a vacuum vessel;
- and
- a rotating body installed rotatably in the vacuum vessel, wherein
- the rotating body has a structure in which a second component is caused to cover a periphery of a first component disposed on an inner side.
A rotating body for vacuum pump installed rotatably in a vacuum vessel of a vacuum pump, characterized by having
- a structure in which a second component formed by solidifying a powder is caused to cover a periphery of a first component disposed on an inner side.
A manufacturing method of a vacuum pump including;
- a vacuum vessel;
- and
- a rotating body installed rotatably in the vacuum vessel, wherein
- the rotating body includes:
- a first process in which a second component formed by solidifying a powder is caused to cover a periphery of a first component disposed on an inner side;
- and
- a second process in which the first component and the second component are subjected to sintering processing altogether.
Dependencies are inferred from the claim text.