Hybrid chemical-physical vapor deposition process for the synthesis of environmental barrier coatings

Abstract

A manufacturing process for the synthesis of environmental barrier coating system (EBC) which protect Si-based Ceramic Matrix Composite (CMC) material against oxidation and volatilization at high temperatures is disclosed. The manufacturing process is carried out in vacuum and includes steps of depositing a silicon bond coat and an oxygen containing barrier coating. The process is supported by plasma, preferably through and arc discharge, which lead to full dissociation of the gas precursors such as silane. Plasma is as well used for pre-treatment of substrates in an uninterrupted process chain. A deposition system with essential vacuum and plasma components is disclosed as well as EBC coatings manufactured by the process.

Dependencies are inferred from the claim text.