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US 2025/0031350 A1Published application
Centrally anchored mems-based active cooling systems
AssigneeFrore Systems Inc.
InventorsAnanth Saran Yalamarthy, Suryaprakash Ganti, Vikram Mukundan, Seshagiri Rao Madhavapeddy, Prabhu Sathyamurthy, Narayana Prasad Rayapati
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Abstract
A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.
Claims20
A fluid flow system, comprising:
- a top chamber having at least one vent;
- a bottom chamber having at least one orifice;
- a support structure coupled to the top chamber or the bottom chamber;
- and
- an actuator element having a central region and a perimeter, the actuator element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the actuator element being between the top chamber and the bottom chamber, the actuator element undergoing vibrational motion when actuated to draw a fluid into the at least one vent and drive the fluid through the at least one orifice;
- wherein the actuator element, top chamber, and bottom chamber are configured such that the vibrational motion of the actuator element drives the fluid from the top chamber to the bottom chamber at a first flow rate and backflow through the at least one orifice being at a second flow rate, the first flow rate being at least twice the second flow rate.
3 more elements
A fluid flow system, comprising:
- a plurality of fluid flow cells, each of the plurality of fluid flow cells including a top chamber, a bottom chamber, a support structure, and an actuator element, the top chamber having at least one vent, the bottom chamber having at least one orifice, the support structure being coupled to the top chamber or the bottom chamber, the actuator element having a central region and a perimeter, the actuator element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the actuator element being between the top chamber and the bottom chamber, the actuator element undergoing vibrational motion when actuated to draw a fluid into the at least one vent and drive the fluid through the at least one orifice, wherein the actuator element, top chamber, and bottom chamber are configured such that the vibrational motion of the actuator element drives the fluid from the top chamber to the bottom chamber at a first flow rate and backflow through the at least one orifice being at a second flow rate, the first flow rate being at least twice the second flow rate.
A method, comprising:
- driving an actuator element to induce a vibrational motion at a frequency, the actuator element being between a top chamber having at least one vent and a bottom chamber having at least one orifice, the actuator element being supported by a support structure coupled to the top chamber or the bottom chamber, the actuator element having a central region and a perimeter, the actuator element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the actuator element undergoing vibrational motion when actuated at the frequency to draw a fluid into the at least one vent and drive the fluid through the at least one orifice, wherein the actuator element, top chamber, and bottom chamber are configured such that the vibrational motion of the actuator element drives the fluid from the top chamber to the bottom chamber at a first flow rate and backflow through the at least one orifice being at a second flow rate, the first flow rate being at least twice the second flow rate.
Dependencies are inferred from the claim text.