Vertical metal splitting using helmets and wrap-around dielectric spacers
AssigneeIntel Corporation
InventorsLeonard P. Guler, Charles Henry Wallace, Paul A. Nyhus
Life of this patent
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AssigneeIntel Corporation
InventorsLeonard P. Guler, Charles Henry Wallace, Paul A. Nyhus
Estimating the term…
Methods for fabricating an IC structure, e.g., for fabricating a metallization stack portion of an IC structure, as well as related semiconductor devices, are disclosed. An example fabrication method includes splitting metal lines that are supposed to be included at a tight pitch in a single metallization layer into two vertically-stacked layers (hence the term “vertical metal splitting”) by using helmets and wrap-around dielectric spacers. Metal lines split into two such layers may be arranged at a looser pitch in each layer, compared to the pitch at which metal lines of the same size would have to be arranged if there were included in a single layer. Increasing the pitch of metal lines may advantageously allow decreasing the parasitic metal-to-metal capacitance associated with the metallization stack.
An integrated circuit (IC) structure, comprising:
An integrated circuit (IC) package, comprising:
A method of providing an integrated circuit (IC) structure, the method comprising:
Dependencies are inferred from the claim text.