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US 2025/0029859 A1Published application
Substrate transfer apparatus allowing movement between layers
AssigneeVM Inc.
InventorsSang Woo Lee, Woo Hyung Choi
Life of this patent
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Abstract
Disclosed is a substrate transfer apparatus including a first moving plate, a second moving plate located on a lower side of the first moving plate, a shuttle that is moved on the first moving plate or the second moving plate and that accommodates a substrate, and a first layer transfer connected to the first moving plate and the second moving plate, and that moves the shuttle from any one of the first moving plate and the second moving plate to the other one.
Claims12
A substrate transfer apparatus comprising:
- a first moving plate;
- a second moving plate located on a lower side of the first moving plate;
- a shuttle configured to be moved on the first moving plate or the second moving plate and configured to accommodate a substrate;
- and
- a first layer transfer connected to the first moving plate and the second moving plate, and configured to move the shuttle from any one of the first moving plate and the second moving plate to the other one.
2 more elements
Dependencies are inferred from the claim text.