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US 2025/0029858 A1Published application
Method and device to distribute gas into a container
AssigneeEntegris, Inc.
InventorsMark V. Smith, Shawn D. Eggum, Matthew A. Fuller
Life of this patent
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AssigneeEntegris, Inc.
InventorsMark V. Smith, Shawn D. Eggum, Matthew A. Fuller
Estimating the term…
A method and purge flow distribution module for controlling flow of purge gas into a substrate container is provided. The purge flow distribution module includes a purge module comprising an inlet for receiving a flow of purge gas, a check valve for regulating a flow direction of the purge gas, a filter, and a filter retainer. A diffuser retainer and a diffusion device can be attached to the filter retainer. The purge module can provide a portion of a flow to the diffusion device and a second portion of the flow can leave the purge module. The purge module can be installed into a housing to define a chamber. The chamber can receive the second portion of the flow and direct the second portion of the flow to another diffusion device.
A purge module, comprising:
A method of directing purge gas into a substrate container, passing the purge gas through a purge module, wherein a first portion of the purge gas passes from the purge module to a diffuser retained by a diffuser retainer of the purge module, and a second portion of the purge gas exits the purge module through one or more apertures defined by one or both of a filter retainer and the diffuser retainer.
A substrate container comprising a purge assembly, the purge assembly including:
Dependencies are inferred from the claim text.