Method and device for front gas delivery into a container
AssigneeEntegris, Inc.
InventorsMark V. Smith, Shawn D. Eggum, Aleksandr A. Yakuba
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AssigneeEntegris, Inc.
InventorsMark V. Smith, Shawn D. Eggum, Aleksandr A. Yakuba
Estimating the term…
A substrate container that includes a shell, a connector, and a gas distributing device. The connector is connected to an opening provided on a side wall of the shell, in which the connector includes a base portion having an inlet and an outlet and a connector body having a first end and a second end. The first end of the connector body is rotatably connected with the outlet of the base portion, and second end of the connector body is connected to the opening of the shell. The gas distributing device connector includes a first end and a second end, in which the first end of the gas distributing device connector is connected with the second end of the connector body and a second end of the gas distributing device connector is configured to connect with a gas distributing device.
A connector for a purge gas assembly for a substrate container, the connector comprising:
A substrate container comprising:
A method for assembling a substrate container having a gas distributing device comprising:
Dependencies are inferred from the claim text.