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US 2025/0028237 A1Published application
Method for manufacturing graphene thin film for pellicle material using ozone gas
AssigneeGrapheneLab.Co.,Ltd.
InventorsGyu Hyun LEE, Young Duck KWON, Byong Wook YOO, Seung Il MOON, Jong Taik MOON, Ki Soo KIM, Sang Min LEE
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Abstract
A method for manufacturing a graphene thin film for a pellicle material using ozone gas includes a graphene forming step of forming graphene on an upper surface of a substrate, an ozone treatment step of exposing the graphene layer formed in the graphene forming step to ozone, and an etching step of heat-treating and etching the ozone-treated graphene layer.
Claims7
A method for manufacturing a graphene thin film for a pellicle material using ozone gas, the method comprising:
- a graphene forming step of forming graphene on an upper surface of a substrate;
- an ozone treatment step of exposing the graphene layer formed in the graphene forming step to ozone;
- and
- an etching step of heat-treating and etching the ozone-treated graphene layer.
1 more element
Dependencies are inferred from the claim text.