Temperature adjustment system and electronic component testing apparatus
AssigneeAdvantest Corporation
InventorsYuya Yamada, Guenther Jeserer
Life of this patent
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AssigneeAdvantest Corporation
InventorsYuya Yamada, Guenther Jeserer
Estimating the term…
A temperature adjustment system for adjusting a temperature of a DUT electrically connected to a socket includes a first temperature adjustment device that supplies a fluid to an internal space in either the socket or a contact member that contacts the DUT when the DUT is pressed against the socket and a second temperature adjustment device that adjusts a temperature of an atmosphere in a chamber in which the socket and the contact member are disposed. The first temperature adjustment device includes a first supplier that supplies a first fluid and includes one or more connectors connected to one or more supply sources that supply the first fluid and a heat exchanger disposed between the one or more connectors and the internal space. The heat exchanger has a heat exchange part exposed in the chamber and exchanges heat between the first fluid and the atmosphere in the chamber.
A temperature adjustment system for adjusting a temperature of a device under test (DUT) electrically connected to a socket, the temperature adjustment system comprising:
Dependencies are inferred from the claim text.