Methods of adjusting uniformity, and related apparatus and systems, for semiconductor manufacturing

A non-transitory computer readable medium applicable for semiconductor manufacturing, the non-transitory computer readable medium comprising instructions that when executed cause a plurality of operations to be conducted, the plurality of operations comprising:

• analyzing a signal profile by comparing the signal profile to a range, the range is less than a threshold ratio of a target value, the threshold ratio is 0.10, and the analyzing comprising:
• identifying a signal difference in the signal profile, and
• determining if the signal difference is within or outside of the range;
• and
• adjusting one or more heating parameters if at least one portion of the signal profile is outside of the range, the adjusting comprising:
• identifying a set of one or more heat sources that correlate with the at least one portion of the signal profile, and
• adjusting a heating power by an adjustment factor for the set of one or more heat sources.

A system for processing substrates and applicable for semiconductor manufacturing, the system comprising:

• a chamber body comprising one or more sidewalls;
• a window, the one or more sidewalls and the window at least partially defining an internal volume;
• one or more heat sources configured to heat the internal volume;
• a substrate support disposed in the internal volume;
• a sensor configured to sense parameters in the internal volume;
• and
• a controller comprising instructions that, when executed, cause a plurality of operations to be conducted, the plurality of operations comprising:
• generating a signal profile, the signal profile comprising a plurality of readings,
• analyzing the signal profile by comparing the signal profile to a range, the range is less than a threshold ratio of a target value, the threshold ratio is 0.10, and the analyzing comprising:
• identifying a signal difference in the signal profile, and
• determining if the signal difference is within or outside of the range,
• and
• adjusting one or more heating parameters if at least one portion of the signal profile is outside of the range, the adjusting comprising:
• identifying a set of one or more heat sources that correlate with the at least one portion of the signal profile, and
• adjusting a heating power by an adjustment factor for the set of one or more heat sources.