Apparatus for manufacturing display apparatus, method of manufacturing display apparatus, and mask assembly

A mask assembly comprising:

• a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening;
• and
• a second mask layer disposed on the first mask layer and including an inorganic material, the inorganic material having a plurality of second mask openings above the plurality of second portion openings, and
• wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.

A method of manufacturing a display apparatus, the method comprising:

• disposing a display substrate in a chamber;
• disposing a mask assembly in the chamber;
• and
• supplying, from a deposition source, a deposition material toward the mask assembly,
• wherein the disposing of the mask assembly comprises:
• disposing a second mask layer on a first mask layer;
• patterning the second mask layer such that a plurality of second mask openings are disposed in the second mask layer;
• forming a plurality of second portion openings in the first mask layer by etching the first mask layer through the plurality of second mask openings;
• and
• forming an opening in a lower portion of the first mask layer.