Pressure sensor
AssigneeBeijing Naura Microelectronics Equipment Co., Ltd.
InventorsFeng ZHANG, Lei HU
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AssigneeBeijing Naura Microelectronics Equipment Co., Ltd.
InventorsFeng ZHANG, Lei HU
Estimating the term…
Provided is a pressure sensor, including a first pedestal (1) and an electrode member (4), the first pedestal (1) is provided with a supporting portion (11) for supporting the electrode member (4), and a plurality of adjusting members (51, 52) are stacked in sequence between two opposite surfaces of the electrode member (4) and the supporting portion (11); and thermal expansion coefficients of the electrode member (4), the plurality of adjusting members (51, 52), and the first pedestal (1) gradually increase in a direction from the electrode member (4) to the supporting portion (11). The pressure sensor can solve the problem of relative displacement of parts caused by a temperature change.
A pressure sensor, comprising a first pedestal and an electrode member, wherein the first pedestal is provided with a supporting portion for supporting the electrode member, and a plurality of adjusting members are stacked in sequence between two opposite surfaces of the electrode member and the supporting portion;
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A pressure sensor, comprising a first pedestal and an electrode member, wherein the first pedestal is provided with a supporting portion for supporting the electrode member, and a plurality of adjusting members are stacked in sequence between two opposite surfaces of the electrode member and the supporting portion;
Dependencies are inferred from the claim text.