Deposition of ultra-thin functional coatings on flexible materials

Abstract

An apparatus and method for depositing functional coatings with different formulations on flexible materials is disclosed. Spatial atomic layer deposition produces dense coatings with few or no pinholes that are conformal to the underlying flexible substrate, which enhances the functional properties of the coatings. The apparatus and method can produce coatings that are single-layer or multi-layer and that have one or more functions. The apparatus and method operate in atmospheric conditions and can be used in a stand-alone or in-line manufacturing process. Spatial atomic layer deposition of metal-oxide barrier coatings on packaging materials is disclosed. The metal-oxide barrier coatings provide superior barrier properties to protect the products in the packaging, may perform additional functions, and may be sufficiently thin that they do not compromise the recyclability and/or compostability and/or biodegradability of sustainable packaging materials.

Dependencies are inferred from the claim text.