Titania-silica glass body with high quality polishing characteristics
AssigneesCorning Incorporated, Hoya Corporation
InventorsSteven Bruce Dawes, Douglas Hull Jennings, Toshihiko Orihara, Pushkar Tandon
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Abstract
A method of forming a glass body, the method including pressing titania-doped silica soot to form a molded body, consolidating the molded body by heating the molded body, annealing the consolidated molded body, and polishing at least one surface of the annealed molded body to form the glass body. After the polishing, the at least one surface of the glass body has a waviness amplitude of about 0.60 nm or less in the spatial frequency range of 0.05 mm−1 or more and 0.2 mm−1 or less.
Claims20
A method of forming a glass body, the method comprising:
- pressing titania-doped silica soot to form a molded body;
- consolidating the molded body by heating the molded body;
- annealing the consolidated molded body;
- and
- polishing at least one surface of the annealed molded body to form the glass body,
- wherein, after the polishing, the at least one surface of the glass body has a waviness amplitude of about 0.60 nm or less in the spatial frequency range of 0.05 mm−1 or more and 0.2 mm−1 or less.
A polished glass body comprising:
- a first surface having a waviness amplitude of about 0.60 nm or less in the spatial frequency range of 0.05 mm−1 or more and 0.2 mm−1 or less,
- wherein the polished glass body is a SiO2—TiO2 glass that contains about 5 wt. % to about 10 wt. % TiO2.
Dependencies are inferred from the claim text.