Microelectromechanical device and microelectromechanical loudspeaker
OwnerMaximilian Sommer, Anton Melnikovinventors
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OwnerMaximilian Sommer, Anton Melnikovinventors
Estimating the term…
A microelectromechanical device for generating a fluid pressure using a displacer unit. The displacer unit has a movable displacer element, which can be deflected to generate a fluid pressure using a drivable connecting element acting on the displacer element. The connecting element has a base structure and a coupling structure connected to the base structure for connecting the connecting element to the displacer element. The base structure includes a mass reduction portion with a material recess. A microelectromechanical loudspeaker having such a microelectromechanical device is also described.
A microelectromechanical device for generating a fluid pressure, comprising:
A microelectromechanical loudspeaker, comprising:
Dependencies are inferred from the claim text.