Substrate transport system and transfer robot

A substrate transport system comprising:

• a transport section that defines a range within which a substrate is transported;
• a first placement portion and a second placement portion on which the substrate is placed;
• and
• a transfer robot that is provided inside the transport section and transports the substrate from the first placement portion to the second placement portion,
• wherein a range of the transport section is set to a predetermined first length that allows a plurality of the first placement portions and the second placement portions to be disposed side by side in a first direction, and a second length that is shorter than the first length in a second direction orthogonal to the first direction,
• wherein the transfer robot includes
• a main body unit that is disposed within the transport section,
• a turning support unit that is connected to the main body unit,
• an arm support unit that is connected to the turning support unit,
• an arm unit that is connected to the arm support unit, and
• a holding unit that is connected to the arm unit and holds the substrate,
• wherein the turning support unit includes
• a first end portion that is rotatably connected to the main body unit, and
• a second end portion to which the arm support unit is rotatably connected,
• wherein the arm unit includes a first arm that is connected to the arm support unit and a second arm to which the holding unit is connected,
• wherein the turning support unit is connected to the main body unit so as to be rotatable about a rotation shaft of a connection portion with the main body unit in a plan view,
• wherein the arm support unit is connected to the turning support unit and the arm unit so as to be independently rotatable,
• wherein the arm support unit is connected to the turning support unit so as to be rotatable about a rotation shaft of a connection portion with the turning support unit in a plan view,
• wherein a center shaft of rotation of the arm support unit relative to the second end portion of the turning support unit and a center shaft of rotation of the arm unit relative to the arm support unit are disposed on the same line,
• wherein the arm unit is connected to the arm support unit so as to be rotatable about a rotation shaft of a connection portion with the arm support unit in a plan view, and
• wherein, in the transfer robot, the main body unit is disposed such that a center of rotation of the first end portion that is connected by the main body unit is located at a central portion of the range of the transport section.