Apparatus and method for plasma treatment of a substrate using automatic water replenishment
AssigneeNox Box Technologies LLC
InventorJoseph E. Lewis, III
Life of this patent
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AssigneeNox Box Technologies LLC
InventorJoseph E. Lewis, III
Estimating the term…
An apparatus for treating a substrate is disclosed. The apparatus includes a water supply tank with a level line and a reservoir filled with water to the level line. The water supply tank may automatically replenish water upon detection of depletion of water beneath the level line. A reaction chamber is communicatively connected to the water supply tank. The reaction chamber contains a pair of electrodes which define a reaction region between each electrode, where the reaction region may surround the substrate. A control module is communicatively connected to at least the reaction chamber and may a control signal. An injector connects the water supply tank to the reaction chamber may generate a dispersion of microfine water droplets from water extracted from the reservoir in response to receipt of the control signal. A platform may support at least the reaction chamber and lay on a flat surface.
An apparatus for treating a substrate, the apparatus comprising:
Dependencies are inferred from the claim text.