Process for manufacturing a three-dimensional structure in bending

A method for manufacturing a three-dimensional structure, the method comprising:

• supplying a stack comprising, stacked in a direction called vertical direction, at least:
• a support substrate,
• a sacrificial layer,
• a layer of interest delimited in all directions of a horizontal plane perpendicular to the vertical direction, by a sidewall,
• a tensor layer delimited in all directions of the horizontal plane by a sidewall, the tensor layer having a residual stress σ100, and
• removing a removal portion of the sacrificial layer, selectively from the layer of interest and the tensor layer, the removal portion forming a closed contour in projection in the horizontal plane, the removal portion being entirely located in line with a lateral portion of the layer of interest extending from the entire sidewall of the layer of interest, the removal of the removal portion being carried out so as to retain a remaining portion of the sacrificial layer, located in line with the layer of interest and the sacrificial layer,
• the residual stress σ100 of the tensor layer being configured to cause bending of the entire layer of interest in a single direction of bending during the step of removing the removal portion.