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US 2024/0405513 A1Published application
Nanowire laser and manufacturing method therefor
AssigneeNippon Telegraph and Telephone Corporation
InventorsMasato Takiguchi, Masaya Notomi, Satoshi Sasaki, Guoqiang Zhang, Kota Tateno, Hisashi Sumikura, Akihiko Shinya
Life of this patent
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Abstract
A nanowire laser includes a nanowire on a substrate and a one-dimensional photonic crystals on ends the nanowire. The nanowire is disposed on a substrate. The nanowire has an elliptical cross-sectional shape with a longitudinal direction parallel to a plane of the substrate. The one-dimensional photonic crystals are separated from each other to form a resonator.
Claims20
1-8. (canceled)
A nanowire laser, comprising:
- a nanowire on a substrate and having an elliptical cross-sectional shape with a longitudinal direction parallel to a plane of the substrate;
- and
- a resonator.
A method of forming a nanowire laser, comprising:
- disposing a nanowire with a circular cross section on a substrate;
- etching the nanowire from above perpendicular to a plane of the substrate using a dry etching method having perpendicular anisotropy, wherein after the etching, a cross section of the nanowire has an elliptical shape with a longitudinal direction parallel to the plane of the substrate;
- and
- forming a resonator.
1 more element
A method, comprising:
- disposing a nanowire having a circular cross-section on a substrate;
- forming an oxide film on a surface of the nanowire;
- forming one-dimensional photonic crystals on each of a first end and a second end of the nanowire with a space therebetween;
- and
- etching the nanowire from above perpendicularly to a plane of the substrate through a dry etching method having perpendicular anisotropy to form an elliptical nanowire having a cross-sectional shape whose longitudinal direction is parallel to the plane of the substrate, the one-dimensional photonic crystals forming a resonator.
2 more elements
Dependencies are inferred from the claim text.