Optical blocking regions for pixel sensors
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Cheng-Ming WU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Chien HSIEH, Yun-Wei CHENG, Wei-Li HU, Kuo-Cheng LEE, Cheng-Ming WU
Estimating the term…
An optical blocking region formed with patterned metal reduces light reflection toward pixel sensors in a pixel sensor array. The optical blocking region may be formed of a metal nanoscale grid in order to reflect more light away from the pixel sensors. The optical blocking region may include a dielectric layer, supporting the patterned metal, with high absorption structures or shallow deep trench isolation structures in order to increase absorption and thus reduce light reflection toward the pixel sensors.
A semiconductor device, comprising:
A method, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.