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US 2024/0404987 A1Published application
Method and device for manufacturing stacked substrate
AssigneeNikon Corporation
InventorsHajime MITSUISHI, Isao SUGAYA
Life of this patent
Estimating the term…
Abstract
A manufacturing method is provided, which includes processing at least one of a plurality of substrates; stacking the plurality of substrates to manufacture a stacked substrate; and correcting, in the processing, a part of an amount of positional misalignment that is generated among a plurality of substrates in the stacking and correcting, in the stacking, at least a part of the remainder of the amount of positional misalignment.
Claims21
1-17. (canceled)
A manufacturing device comprising:
- a control device that transmits first information based on a measurement result of a first stack formed by stacking at least two substrates, to a treating device, and transmits second information based on the measurement result, to a stacking device,
- wherein the treating device treats a first substrate based on the first information, and
- wherein the staking device stacks the first substrate and a second substrate based on the second information so as to form a second stack.
A manufacturing device comprising:
- a control device that transmits first information based on a positional misalignment between at least two substrates in a first stack formed by stacking the at least two substrates, to a treating device, and transmits second information based on the positional misalignment, to a stacking device,
- wherein the treating device treats a first substrate based on the first information, and
- wherein the staking device stacks the first substrate and a second substrate based on the second information so as to form a second stack.
A manufacturing method comprising:
- transmitting first information based on a measurement result of a first stack formed by stacking at least two substrates, to a treating device;
- and
- transmitting second information based on the measurement result, to a stacking device,
- wherein the treating device treats a first substrate based on the first information, and
- wherein the stacking device stacks the first substrate and a second substrate based on the second information so as to form a second stack.
2 more elements
A manufacturing method comprising:
- transmitting first information based on a positional misalignment between at least two substrates in a first stack formed by stacking the at least two substrates, to a treating device;
- and
- transmitting second information based on the positional misalignment, to a stacking device,
- wherein the treating device treats a first substrate based on the first information, and
- wherein the stacking device stacks the first substrate and a second substrate based on the second information so as to form a second stack.
2 more elements
Dependencies are inferred from the claim text.