Systems and methods for managing seismic forces

A substrate processing apparatus, comprising:

• a substrate retainer;
• and
• a substrate retainer transport mechanism, the substrate retainer transport mechanism including:
• a transport mechanism track;
• a substrate retainer support base;
• a substrate retainer support cap;
• a plurality of elastic members between the substrate retainer support base and the substrate retainer support cap;
• and
• a plurality of damping members between the substrate retainer support base and the substrate retainer support cap.

A thermal processing system, comprising:

• a substrate boat;
• a substrate boat elevator, the substrate boat elevator including:
• a boat elevator track;
• a boat elevator arm base connected to the boat elevator track;
• a boat elevator arm cap;
• a three springs between an upper surface of the boat elevator arm base and a lower surface of the boat elevator arm cap;
• and
• a plurality of adjustable damping members between the upper surface of the boat elevator arm base and the lower surface of the boat elevator arm cap, each of the adjustable damping members including an upper portion and a lower portion connected by a threaded member, each of the upper portion and the lower portion including a damping material segment attached to a connector segment;
• and
• a thermal processing chamber.