Mobile Cart for Commissioning Semiconductor Processing Tool
AssigneeApplied Materials, Inc.
InventorsSam KIM, Kon Tae PARK, Yao-Hung YANG, Michael John PERRY, Michael LEVKOVITCH, Ram Chandra PALSANIYA, Nitin KHURANA, Derek MCQUARRIE
Life of this patent
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Abstract
Methods and apparatus for commissioning a semiconductor processing tool include connecting a mobile facilities cart to a semiconductor processing tool; supplying facilities from the mobile facilities cart to the semiconductor processing tool; and operating the semiconductor processing tool using facilities supplied by the connected mobile facilities cart.
Claims20
A method for commissioning a semiconductor processing tool, the method comprising:
- connecting a mobile facilities cart to a semiconductor processing tool;
- supplying facilities from the mobile facilities cart to the semiconductor processing tool;
- and
- operating the semiconductor processing tool using facilities supplied by the connected mobile facilities cart.
An apparatus for commissioning a semiconductor processing tool, the apparatus comprising:
- at least one battery pack configured to supply electrical power to the semiconductor processing tool via a power port;
- a compressor powered by the at least one battery pack, the compressor configured to supply compressed air to the semiconductor processing tool via a compressed air port;
- a vacuum pump powered by the at least one battery pack, the vacuum pump configured to supply vacuum to the semiconductor processing tool via a vacuum port;
- and
- a housing supporting the battery pack, the compressor, and the vacuum pump.
A system for commissioning a semiconductor processing tool, the system comprising:
- a facilities cart comprising:
- a battery pack configured to supply electrical power to the semiconductor processing tool via a power port;
- a compressor powered by the battery pack, the compressor configured to supply compressed air to the semiconductor processing tool via a compressed air port;
- a vacuum pump powered by the battery pack, the vacuum pump configured to supply vacuum to the semiconductor processing tool via a vacuum port;
- and
- a battery cart connected to the facilities cart, the battery cart comprising:
- a battery pack configured to supply electrical power to the facilities cart.
Dependencies are inferred from the claim text.