Resist composition and method for producing resist pattern

A resist composition comprising an acid generator including a salt represented by formula (I), and a crosslinking agent:

• wherein, in formula (I),
• X represents a sulfur atom or an iodine atom,
• m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0,
• R1, R2 and R3 each independently represent a hydroxy group, —X2—R10 or —X2 -L10-X3—R10,
• X2 and X3 each independently represent*—CO—O—,*—O—CO—,*—O—CO—O— or *—O— (in which*represents a bonding site to Ar1, Ar2, Ar3, the benzene ring or L10),
• L10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—,
• R4, R5 and R6 each independently represent a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, —X2—R10 or —X2-L10-X3—R10, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
• R7, R8 and R9 each independently represent a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, —X2—R10 or —X2-L10-X3—R10, the hydrocarbon group may have a substituent, —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S—, —SO— or —SO2—, when X is a sulfur atom, R7 and R8 or R8 and R9 may be bonded to form a ring containing S+, —CH2— included in the ring may be replaced by —O—, —S—, —CO—, —SO— or —SO2—, and R7 and R8 or R8 and R9 constituting the ring may be a single bond formed between two benzene rings bonded to X+,
• R10 represents an acid-labile group,
• A1, A2 and A3 each independently represent a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
• Ar1, Ar2 and Ar3 each independently represent an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms,
• m1 represents an integer of 0 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
• m2 represents an integer of 0 to 5, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
• m3 represents an integer of 0 to 5, and when m3 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
• m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
• m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
• m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the same or different from each other,
• m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
• m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R3 may be the same or different from each other,
• m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R9 may be the same or different from each other,
• in which 0 ≤m1+m7≤5, 0≤m2+m8≤5, 0≤m3+m9≤5, at least one of m1, m2, m3, m7, m8 and m9 represents an integer of 1 or more, and when m1, m2 and m3=0, at least one of one or more R7, R8 and R9 represents a hydroxy group, —X2 —R10′ or —X2 -L′ l —X3 —R10, and
• AI− represents an organic anion.