Resist topcoat composition, and method of forming patterns using the composition

A resist topcoat composition, comprising

• a copolymer comprising
• a first structural unit represented by Chemical Formula M-1,
• a second structural unit represented by Chemical Formula M-2, and
• a third structural unit comprising at least one selected from among structural units represented by Chemical Formula M-3A, Chemical Formula M-3B, Chemical Formula M-3C, and Chemical Formula M-3D;
• and
• a solvent:
• wherein, in Chemical Formula M-1 and Chemical Formula M-2,
• R1 and R2 are each independently hydrogen or a substituted or unsubstituted C1 to C10 alkyl group,
• L1 and L2 are each independently a single bond, a substituted or unsubstituted C1 to C10 alkylene group, or a combination thereof,
• X1 is a single bond, O, S, S(O), S(O)2, C(O), (CO)O, O(CO), O(CO)O, NRa (wherein, Ra is hydrogen, deuterium, or a C1 to C10 alkyl group), or a combination thereof,
• R7 is hydrogen, fluorine, a hydroxyl group, a substituted or unsubstituted C1 to C20 alkyl group, or a combination thereof,
• R8 are each independently hydrogen, or C(═O)Rb,
• Rb is a substituted or unsubstituted C1 to C10 alkyl group,
• at least one of R7, L1, or L2 comprises fluorine and a hydroxyl group,
• R9 are each independently hydrogen, a halogen, a hydroxyl group, a substituted or unsubstituted C1 to C10 alkyl group, or a combination thereof, and
• m1 is an integer of 1 to 4,
• wherein, in Chemical Formula M-3A to Chemical Formula M-3D,
• R3 to R6 are each independently hydrogen or a substituted or unsubstituted C1 to C10 alkyl group,
• R10 and R11 are each independently hydrogen, a hydroxyl group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C6 to C20 aryl group, NRcRd (wherein, Rc and Rd are each independently hydrogen, deuterium, or a C1 to C10 alkyl group), or a combination thereof,
• R12 to R21 are each independently hydrogen, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C6 to C20 aryl group, NRcRd (wherein, Rc and Rd are each independently hydrogen, deuterium, or a C1 to C10 alkyl group), or a combination thereof,
• L3 to L9 are each independently a single bond, a substituted or unsubstituted C1 to C10 alkylene group, a substituted or unsubstituted C6 to C12 arylene group, or a combination thereof,
• X2 and X5 are each independently a single bond, O, or S,
• X3 and X4 are each independently a single bond, (CO)O, O(CO), or O(CO)O,
• X6 is a single bond, O, or CH2,
• n1 is an integer of 0 or 1,
• n2 is an integer of 1 to 3, and
• * is a linking point.