Package structure and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hsin LU, Chia-Chia LIN, Ching-Ho CHIN, Chung-Hao TSAI, Chuei-Tang WANG, Chen-Hua YU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hsin LU, Chia-Chia LIN, Ching-Ho CHIN, Chung-Hao TSAI, Chuei-Tang WANG, Chen-Hua YU
Estimating the term…
A package structure and method for forming the same are provided. The package structure includes a substrate having a front-side surface and a back-side surface, and an electrical device formed over the front-side surface of a substrate. The package structure includes a dielectric layer formed below and in direct contact with the back-side surface of the substrate, and a first optical device formed in the dielectric layer. The package structure also includes a protective layer formed below or above the first optical device; and an electro-optic effect material layer formed in the protective layer.
A package structure, comprising:
A package structure, comprising:
A method for forming a package structure, comprising:
Dependencies are inferred from the claim text.