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US 2024/0393360 A1Published application
Inertial sensor module, inertial measurement unit, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorMasayasu Sakuma
Life of this patent
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Abstract
An inertial sensor module includes a first inertial sensor that detects a physical quantity of a first axis, a second inertial sensor that detects the physical quantity of the first axis, a substrate includes a first region in which the first inertial sensor and the second inertial sensor are mounted, a second region surrounding the first region, and a plurality of slits provided between the first region and the second region to surround the first region.
Claims20
An inertial sensor module comprising:
- a first inertial sensor that detects a physical quantity of a first axis;
- a second inertial sensor that detects the physical quantity of the first axis;
- and
- a substrate including a first region in which the first inertial sensor and the second inertial sensor are mounted, a second region surrounding the first region, and a plurality of slits provided between the first region and the second region to surround the first region.
1 more element
An inertial sensor module comprising:
- a first inertial sensor that detects a physical quantity of a first axis;
- a second inertial sensor that detects the physical quantity of the first axis;
- and
- a substrate including a first region in which the first inertial sensor and the second inertial sensor are mounted, a second region surrounding the first region, a third region surrounding the first region between the first region and the second region, a first plurality of slits provided between the first region and the third region to surround the first region, and a second plurality of slits provided between the third region and the second region to surround the third region.
1 more element
Dependencies are inferred from the claim text.